Large-area single-mode selectively oxidized VCSELs: approaches and experimental

Heiko J. Unold; Sawat W. Z. Mahmoud; Franz Eberhard; Roland Jaeger; Max Kicherer; Felix Mederer; Michael C. Riedl; Karl Joachim Ebeling

doi:10.1117/12.384377

1 May 2000 Large-area single-mode selectively oxidized VCSELs: approaches and experimental

Heiko J. Unold, Sawat W. Z. Mahmoud, Franz Eberhard, Roland Jaeger, Max Kicherer, Felix Mederer, Michael C. Riedl, Karl Joachim Ebeling

Author Affiliations +

Proceedings Volume 3946, Vertical-Cavity Surface-Emitting Lasers IV; (2000) https://doi.org/10.1117/12.384377
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

We present the investigation of several methods to increase the active diameter of single transverse mode oxide confined VCSELs in both the 850 and 980 nm wavelength regimes. Among the concepts considered are mode intensity specific shallow surface etched reliefs, monolithically increased cavity lengths, current confinement matching the fundamental mode intensity distribution and saturable absorbers. All approaches are introduced in theoretical considerations and corresponding measurement results are presented. Additionally, numerical simulations are performed to gain an increased understanding of some of the mode selection mechanisms. The considered concepts are evaluated in terms of decrease of the series resistance (for impedance matching/driving reasons) and device lifetime (as derived from maximum current densities). The results obtained are also compared to other approaches found in literature (e.g. metal apertures, photocurrent feedback, Fabry-Perot etalon, half-symmetric cavity). Conventional devices with optimized thin oxide aperture location have shown single-mode output powers above 4 mW with an active diameter of 3.5 micrometer. A record high single-transverse mode output power of 5 mW at a series resistance of 98 (Omega) is obtained for a 7 micrometer aperture device by increasing the cavity length monolithically by 4 micrometer.

Citation Download Citation

Heiko J. Unold, Sawat W. Z. Mahmoud, Franz Eberhard, Roland Jaeger, Max Kicherer, Felix Mederer, Michael C. Riedl, and Karl Joachim Ebeling "Large-area single-mode selectively oxidized VCSELs: approaches and experimental", Proc. SPIE 3946, Vertical-Cavity Surface-Emitting Lasers IV, (1 May 2000); https://doi.org/10.1117/12.384377

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available