Method of determining small linear displacement

Andriy Yurievich Popov; Vitaly M. Belous; Valery P. Churashov; Lidiya I. Manchenko; Vladimir E. Mandel; Yuriy B. Shugailo; Alexander V. Tyurin

doi:10.1117/12.370415

18 November 1999 Method of determining small linear displacement

Andriy Yurievich Popov, Vitaly M. Belous, Valery P. Churashov, Lidiya I. Manchenko, Vladimir E. Mandel, Yuriy B. Shugailo, Alexander V. Tyurin

Author Affiliations +

Proceedings Volume 3904, Fourth International Conference on Correlation Optics; (1999) https://doi.org/10.1117/12.370415
Event: International Conference on Correlation Optics, 1999, Chernivsti, Ukraine

Abstract

A method of small linear displacement determination with subnanometer accuracy, which is based on interaction of the interference field of two laser beams with a 3D holographic diffraction grating fastened on the moveable object, was suggested.

Citation Download Citation

Andriy Yurievich Popov, Vitaly M. Belous, Valery P. Churashov, Lidiya I. Manchenko, Vladimir E. Mandel, Yuriy B. Shugailo, and Alexander V. Tyurin "Method of determining small linear displacement", Proc. SPIE 3904, Fourth International Conference on Correlation Optics, (18 November 1999); https://doi.org/10.1117/12.370415

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