Comparison of grating structures in optical fibers and integrated optics for MEMS applications

Seriampalayam R. Natarajan; Vadakke Matham Murukeshan; Anand Krishna Asundi

doi:10.1117/12.369331

11 November 1999 Comparison of grating structures in optical fibers and integrated optics for MEMS applications

Seriampalayam R. Natarajan, Vadakke Matham Murukeshan, Anand Krishna Asundi

Author Affiliations +

Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369331
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

With the emergence of new trends in optical communication and sensing syste, the importance and need for novel concepts such as diffractive gratings that can be implemented on a microscale has become a thrust area of research. In this paper, we compare various grating structures and their suitability for MEMS applications. The design approach, analysis and integration into optical systems are discussed in the context of both fiber and planar waveguide technology. Also, the differences and similarities among these methodologies using silicon micromachining are brought out. Parameters of interest, such as efficiency of micro-grating structures and ambient effects that influence the performance of the devices/systems are also discussed.

Citation Download Citation

Seriampalayam R. Natarajan, Vadakke Matham Murukeshan, and Anand Krishna Asundi "Comparison of grating structures in optical fibers and integrated optics for MEMS applications", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); https://doi.org/10.1117/12.369331

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