Gate-length- and threshold-voltage-dependent nonlinearity in the hot carrier DC lifetime extrapolation for sub-100-nm NMOS devices

Sejal N. Chheda; Navakanta Bhat; Paul Tsui; Suzanne Gonzales; Nigel Cave; Chong-Cheng Fu; Fred Huang; Amit Nangia; Philip Sung-Joon Choi; Sean Collins

doi:10.1117/12.360551

1 September 1999 Gate-length- and threshold-voltage-dependent nonlinearity in the hot carrier DC lifetime extrapolation for sub-100-nm NMOS devices

Sejal N. Chheda, Navakanta Bhat, Paul Tsui, Suzanne Gonzales, Nigel Cave, Chong-Cheng Fu, Fred Huang, Amit Nangia, Philip Sung-Joon Choi, Sean Collins

Author Affiliations +

Proceedings Volume 3881, Microelectronic Device Technology III; (1999) https://doi.org/10.1117/12.360551
Event: Microelectronic Manufacturing '99, 1999, Santa Clara, CA, United States

Abstract

In this paper, we discuss the issues involved in the DC hot carrier lifetime extrapolation of sub 100nm NMOS transistors. We look at device degradation due to hot- carrier injection in NMOS transistors with 20 angstrom and 25 angstrom thermal and nitrided oxide gate dielectrics. Stress conditions such as Vg < Vt, Vg > Vt, Vd equals Vd, and Vg at Isubmax are evaluated. Previously, devices greater than 100nm gate length had highest hot carrier degradation at Vg at Isubmax and 1/Vdd linear extrapolation from accelerated stressing condition to operation condition was able to estate the DC lifetime. However, we show that the conventional extrapolation results in a nonlinear fit for devices with gate length

Citation Download Citation

Sejal N. Chheda, Navakanta Bhat, Paul Tsui, Suzanne Gonzales, Nigel Cave, Chong-Cheng Fu, Fred Huang, Amit Nangia, Philip Sung-Joon Choi, and Sean Collins "Gate-length- and threshold-voltage-dependent nonlinearity in the hot carrier DC lifetime extrapolation for sub-100-nm NMOS devices", Proc. SPIE 3881, Microelectronic Device Technology III, (1 September 1999); https://doi.org/10.1117/12.360551

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available