Near-field optical head on disk mastering process

Shingo Imanishi; Tsutomu Ishimoto; Yuichi Aki; Takao Kondo; Masanobu Yamamoto

doi:10.1117/12.997617

28 June 1999 Near-field optical head on disk mastering process

Shingo Imanishi, Tsutomu Ishimoto, Yuichi Aki, Takao Kondo, Masanobu Yamamoto

Proceedings Volume 3864, Joint International Symposium on Optical Memory and Optical Data Storage 1999; 386404 (1999) https://doi.org/10.1117/12.997617
Event: Optical Data Storage, 1999, Kauai, HI, United States

Abstract

The focus-servo system on optical disc mastering conventionally used to be with the off-axis optical setup. As Fig.l shows, a laser beam which does not expose photo-resist, like a red He-Ne laser, leads to an objective from a point off of the optical axis, reflects on the surface ofthe photo-resist and returns in the direction of the incident beam. The reflected beam changes the beam angle from the optical axis according to the working distance of the objective, and is detected as a position with a PSD(Position Sensor Diode). The position-signal from PSD feeds back to the VCM and controls the working distance statically. The focus-servo error remains normally 30nmPP. In the near field operation, however, the working distance should be less than the wavelength The fluctuation caused by that error has a risk of collision between the objective and the glass master. The requirement must be one order of magnitude below like lOnmPP. So a new type of focusservo system had been required.

Citation Download Citation

Shingo Imanishi, Tsutomu Ishimoto, Yuichi Aki, Takao Kondo, and Masanobu Yamamoto "Near-field optical head on disk mastering process", Proc. SPIE 3864, Joint International Symposium on Optical Memory and Optical Data Storage 1999, 386404 (28 June 1999); https://doi.org/10.1117/12.997617

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