Mathematical methods of measurement evaluation in the light-cut profile meter

Miroslav Hain; Jan Bartl; Miroslav Keppert

doi:10.1117/12.353076

14 July 1999 Mathematical methods of measurement evaluation in the light-cut profile meter

Miroslav Hain, Jan Bartl, Miroslav Keppert

Proceedings Volume 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; (1999) https://doi.org/10.1117/12.353076
Event: Eleventh Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1998, Stara Lesna, Slovakia

Abstract

Several mathematical methods of center evaluation of laser spot on a surface measured by the light-cut profile meter are described and analyzed. All these methods are implemented in the light-cut profile meter software and compared from the point of view of uncertainty measurement minimization. A novel method of center evaluation based upon approximation of laser spot intensity distribution by polynomial of second order is also introduced. Experimental results have shown, that this method gives the best results from the point of view of measurement uncertainty minimization.

Citation Download Citation

Miroslav Hain, Jan Bartl, and Miroslav Keppert "Mathematical methods of measurement evaluation in the light-cut profile meter", Proc. SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (14 July 1999); https://doi.org/10.1117/12.353076

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