Fabrication of Wolter I multilayer coated optics via electroforming: an update

Melville P. Ulmer; Robert I. Altkorn; Anita Madan; Michael E. Graham; Yip-Wah Chung; Allen S. Krieger; Chian Liu; Barry P. Lai; Derrick C. Mancini; Peter Z. Takacs

doi:10.1117/12.370081

16 November 1999 Fabrication of Wolter I multilayer coated optics via electroforming: an update

Melville P. Ulmer, Robert I. Altkorn, Anita Madan, Michael E. Graham, Yip-Wah Chung, Allen S. Krieger, Chian Liu, Barry P. Lai, Derrick C. Mancini, Peter Z. Takacs

Author Affiliations +

Proceedings Volume 3773, X-Ray Optics Design, Performance, and Applications; (1999) https://doi.org/10.1117/12.370081
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Previously we reported the ability to lift off, via electroforming, multilayers deposited on gold coated flat mandrels. We had shown the multilayers remained intact after separation as the X-ray reflectivity produced peaks in the reflectivity versus energy measurements. Since gold is high a Z material and is not easy to remove via chemical etching, we have now developed the ability to use a low-Z material that is also etchable. Moreover, we improved the quality of the smoothing with the process of amorphous carbon nitride (CN_x) deposition on electroless nickel in both our test chamber and our much larger fabrication chamber. Our method of mandrel preparation is to first deposit CN_x on electroless nickel, then a low-Z release layer, and then the multilayers. We have demonstrated that flat mandrels produced in this manner can be cooled to liquid nitrogen temperatures without harm. This is important as the usual practice is to shrink mandrels that have Wolter I shape via liquid nitrogen. We have coated a truncated-cone-shaped 'engineering' (not high quality in terms of smoothness) mandrel and have removed the layers, intact, on the inside of an electroform with a cylindrical, truncated- cone geometry. We report the details of the fabrication, engineering, and X-ray tests.

Citation Download Citation

Melville P. Ulmer, Robert I. Altkorn, Anita Madan, Michael E. Graham, Yip-Wah Chung, Allen S. Krieger, Chian Liu, Barry P. Lai, Derrick C. Mancini, and Peter Z. Takacs "Fabrication of Wolter I multilayer coated optics via electroforming: an update", Proc. SPIE 3773, X-Ray Optics Design, Performance, and Applications, (16 November 1999); https://doi.org/10.1117/12.370081

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available