Advantages of evaporation of hafnium in a reactive environment formanufacture of high-damage-threshold multilayer coatings by electron-beam deposition

Christopher J. Stolz; Lynn Matthew Sheehan; Marc K. Von Gunten; Ron P. Bevis; Douglas J. Smith

doi:10.1117/12.360095

7 September 1999 Advantages of evaporation of hafnium in a reactive environment formanufacture of high-damage-threshold multilayer coatings by electron-beam deposition

Christopher J. Stolz, Lynn Matthew Sheehan, Marc K. Von Gunten, Ron P. Bevis, Douglas J. Smith

Author Affiliations +

Proceedings Volume 3738, Advances in Optical Interference Coatings; (1999) https://doi.org/10.1117/12.360095
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

Electron-beam deposition is the current method to produce large-aperture high laser-induced damage threshold coatings for the National Ignition Facility, a 1.8 MJ fusion laser. The e-beam process is scalable to large optics up to 0.25 m² and with laser conditioning has relatively benign coating defect ejections resulting in high damage threshold thin films. The latest technological breakthrough in manufacturing high damage threshold coatings is e-beam deposition of hafnia by evaporation from a metallic instead of an oxide source in a reactive environment. Although the damage threshold is not significantly increased, a 3-10x defect reduction occurs resulting in significantly less coating modification during laser conditioning. Additional benefits of this technology include improved interfaces for the elimination of flat-bottom pits and up to 3x reduction in plume instability for improved layer thickness control and spectral performance.

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Christopher J. Stolz, Lynn Matthew Sheehan, Marc K. Von Gunten, Ron P. Bevis, and Douglas J. Smith "Advantages of evaporation of hafnium in a reactive environment formanufacture of high-damage-threshold multilayer coatings by electron-beam deposition", Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); https://doi.org/10.1117/12.360095

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