Precision machining using UV and ultrashort-pulse lasers

Hans Kurt Toenshoff; Ferdinand von Alvensleben; Andreas Ostendorf; Guido Willmann; Thilo Wagner

doi:10.1117/12.341243

10 March 1999 Precision machining using UV and ultrashort-pulse lasers

Hans Kurt Toenshoff, Ferdinand von Alvensleben, Andreas Ostendorf, Guido Willmann, Thilo Wagner

Author Affiliations +

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341243
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

This paper gives a survey of the possibilities and limitations concerning precision laser machining of different materials used in microsystems. The presented investigations were performed using 193 nm and 248 nm excimer, frequency converted Nd:YAG and 780 nm Ti:Sapphire femtosecond laser radiation. Besides providing technologies for precise and micro laser machining, the examinations were focused on reducing machining time and costs. The importance of adapted processing techniques, including the use of flexible masks in combination with excimer lasers is presented. Depending on the target material and processing parameters, different machining techniques are discussed. Since one single laser type cannot serve to fulfill all requirements in cutting, material removal, drilling, surface structuring, or metallization, each application asks for a well-considered system choice, and a specific process optimization.

Citation Download Citation

Hans Kurt Toenshoff, Ferdinand von Alvensleben, Andreas Ostendorf, Guido Willmann, and Thilo Wagner "Precision machining using UV and ultrashort-pulse lasers", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341243

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