Optical proximity correction for submicron lithography by laser direct writing

Yongkang Guo; Jinglei Du; Qizhong Huang; Jun Yao; Chuankai Qiu; Zheng Cui

doi:10.1117/12.354383

26 July 1999 Optical proximity correction for submicron lithography by laser direct writing

Yongkang Guo, Jinglei Du, Qizhong Huang, Jun Yao, Chuankai Qiu, Zheng Cui

Proceedings Volume 3679, Optical Microlithography XII; (1999) https://doi.org/10.1117/12.354383
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Generally, a laser direct writing lithography system can only produce feature sizes larger than its beam spot size. When the feature size is comparable to its spot size, corner rounding and line shortening appears. This is caused by optical proximity effect. The effect is mainly due to light intensity spread in a laser beam which causes the spread of photon energy in resist layer. A new pre-compensation method has been developed to correct the optical proximity effect. The method has been implemented in the ISI-2802 laser direct write system. Feature size down to 0.6 micrometers has been produced with the system which normally can only produce 1 micrometers lithography without proximity correction.

Citation Download Citation

Yongkang Guo, Jinglei Du, Qizhong Huang, Jun Yao, Chuankai Qiu, and Zheng Cui "Optical proximity correction for submicron lithography by laser direct writing", Proc. SPIE 3679, Optical Microlithography XII, (26 July 1999); https://doi.org/10.1117/12.354383

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available