Integration of silicon bench micro-optics

Hongtao Han; Jared D. Stack; Jay Mathews; Charles S. Koehler; Eric G. Johnson; Alan D. Kathman

doi:10.1117/12.348318

30 April 1999 Integration of silicon bench micro-optics

Hongtao Han, Jared D. Stack, Jay Mathews, Charles S. Koehler, Eric G. Johnson, Alan D. Kathman

Proceedings Volume 3631, Optoelectronic Integrated Circuits and Packaging III; (1999) https://doi.org/10.1117/12.348318
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

Silicon v-groove structures have been utilized for passive positioning of optical fiber for fiber optic and opto- electronic applications. In this paper, we will present our results of using micro-machined silicon v-groove arrays to passively align optical fiber arrays to micro rod optics. We will also demonstrate the integration of N fiber arrays bonded into the silicon v-groove with a 1xN micro lens array, which is composed of a 2 inch-phase level diffractive optics. For the assembly of 1x6 fiber array and lens array with 16 phase level diffractive optics, the experimental results indicated that total insertion loss per link is typically 1.5-2.0 dB/channel.

Citation Download Citation

Hongtao Han, Jared D. Stack, Jay Mathews, Charles S. Koehler, Eric G. Johnson, and Alan D. Kathman "Integration of silicon bench micro-optics", Proc. SPIE 3631, Optoelectronic Integrated Circuits and Packaging III, (30 April 1999); https://doi.org/10.1117/12.348318

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