Silicon microfabricated device for a non-sheath-flow cytometer

Martin A. Afromowitz; Ming-Chieh Huang

doi:10.1117/12.336935

15 January 1999 Silicon microfabricated device for a non-sheath-flow cytometer

Martin A. Afromowitz, Ming-Chieh Huang

Proceedings Volume 3570, Biomedical Sensors, Fibers, and Optical Delivery Systems; (1999) https://doi.org/10.1117/12.336935
Event: BiOS Europe '98, 1998, Stockholm, Sweden

Abstract

We report on the design and fabrication of a low Reynolds number silicon/pyrex microfluidic device that forces particles flowing in a microchannel to a tightly-focused equilibrium position. This device can be used for optical biomedical systems such as a flow cytometer so that particles can flow in a precise position without sheath flow for precision scattering or fluorescence measurements. Devices with a range of dimensions were fabricated using photolithography and wet chemical etching techniques. Particle positions in the channel are determined by observing the direct image as well as two reflection images from the sloping, polished channel walls. We tested devices with various ratios of width to particle diameter at a range of flow rates. When scattering signals from 10 micrometers polymer beads are measured, we observe that the tight equilibrium position attained by the particles results in a much smaller standard deviation of the scattering signal than is observed in other microflow channel devices that do not focus the particles to equilibrium positions.

Citation Download Citation

Martin A. Afromowitz and Ming-Chieh Huang "Silicon microfabricated device for a non-sheath-flow cytometer", Proc. SPIE 3570, Biomedical Sensors, Fibers, and Optical Delivery Systems, (15 January 1999); https://doi.org/10.1117/12.336935

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