Paper
5 August 1998 3D measurement of an aspherical surface with a one-interferogram method
Wensheng Wang, Yang Xiang, Haicheng Zhang
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Abstract
In this paper, with the aid of Fourier transform and reverse Fourier transform not only 2D contour map, but also 3D plot of a tested aspherical surface is obtained by 1- interferogram method, so a simple method is provided for autocontrolling machine-shaping of an aspherical surface. In order to test a variety of aspherical surface, a quasi- universal compensator is designed. The experiment setup for testing aspherical surface is Tywman-CCD-computer system.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wensheng Wang, Yang Xiang, and Haicheng Zhang "3D measurement of an aspherical surface with a one-interferogram method", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); https://doi.org/10.1117/12.318327
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KEYWORDS
Fourier transforms

Surface finishing

3D metrology

Beam splitters

CCD cameras

Mirrors

Spherical lenses

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