GaAs 1x4 optical power splitter

Jianyi Yang; Minghua Wang

doi:10.1117/12.317987

12 August 1998 GaAs 1x4 optical power splitter

Jianyi Yang, Minghua Wang

Proceedings Volume 3551, Integrated Optoelectronics II; (1998) https://doi.org/10.1117/12.317987
Event: Photonics China '98, 1998, Beijing, China

Abstract

In this paper, an optical power splitter based on MMI coupler in GaAs/GaAlAs heterostructure materials is fabricated. The epitaxial materials are grown by MBE. The dry etching process is applied to fabricate the ribs in this device. The measuring results are presented.

Citation Download Citation

Jianyi Yang and Minghua Wang "GaAs 1x4 optical power splitter", Proc. SPIE 3551, Integrated Optoelectronics II, (12 August 1998); https://doi.org/10.1117/12.317987

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