Micromachined inductive displacement sensor

Thomas Velten; Peter Krause; D. Stefan; Ernst Obermeier

doi:10.1117/12.323906

8 September 1998 Micromachined inductive displacement sensor

Thomas Velten, Peter Krause, D. Stefan, Ernst Obermeier

Author Affiliations +

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323906
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

In this paper a new concept for a micro coil for the realization of a displacement sensor or angular sensor is presented. The sensor consists of a 3D coil, consisting of two half coils and a movable iron core. Though the coil is fabricated by means of silicon bulk micromachining, it is possible to move an iron core through the coil without destroying the windings. The inductance of the coil is 0.25 (mu) H without core and 7.2 (mu) H with core. The ohmic resistance has a value of 60 (Omega) . The sensors developed are used in gesture recognition. For this application several micro coils are mounted on a data glove. The sensors have the task to measure the flexion of fingers.

Citation Download Citation

Thomas Velten, Peter Krause, D. Stefan, and Ernst Obermeier "Micromachined inductive displacement sensor", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323906

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