MEMS actuators and micropositioners for integrated micro-optics

Shi-sheng Lee; Li S. Fan; Ming C. Wu

doi:10.1117/12.305479

20 April 1998 MEMS actuators and micropositioners for integrated micro-optics

Shi-sheng Lee, Li S. Fan, Ming C. Wu

Proceedings Volume 3289, Micro-Optics Integration and Assemblies; (1998) https://doi.org/10.1117/12.305479
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

Silicon micromachining technology has opened up many new possibilities in implementing optical and optoelectronic systems in micro scale. It offers unparalleled capabilities in extending the functionality of optical devices and the miniaturization of optical systems. Movable structures, microactuators, micropositioners and micro-optical elements can be monolithically integrated on the same substrate-using batch processing technologies. In this paper, we report the recent progresses in developing of MEMS actuators and micropositioners based on silicon surface micromachining technology. In particular, free-space fiber optic switches and micro-XYZ stages will be discussed. A 2 X 2 free- space fiber optic switch consist of an out-of-plane micromirror driven by integrated scratch device actuators (SDA), and a build-in balancing spring. A fall time and a rise time of 15 ms and 6 ms have been achieved, respectively. In addition, a self-assembled micro-XYZ stage, hybrid-integrated with a 300 micrometers micro-ball lens has been demonstrated for active alignment in the free-space Si micro-optical bench. We have achieved up to 100 micrometers in all three independent axes for the micro ball lens with integrated SDAs that have a step resolution of 27 nm. This novel device can be used for dynamic tracking and alignment between fiber/fiber and fiber/laser free-space optical interconnects, with increased efficiency and vibration stability.

Citation Download Citation

Shi-sheng Lee, Li S. Fan, and Ming C. Wu "MEMS actuators and micropositioners for integrated micro-optics", Proc. SPIE 3289, Micro-Optics Integration and Assemblies, (20 April 1998); https://doi.org/10.1117/12.305479

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