Buried heterostructure quantum cascade lasers

Mattias Beck; Jerome Faist; Claire F. Gmachl; Federico Capasso; Deborah L. Sivco; James N. Baillargeon; Alfred Y. Cho

doi:10.1117/12.304449

7 April 1998 Buried heterostructure quantum cascade lasers

Mattias Beck, Jerome Faist, Claire F. Gmachl, Federico Capasso, Deborah L. Sivco, James N. Baillargeon, Alfred Y. Cho

Proceedings Volume 3284, In-Plane Semiconductor Lasers: from Ultraviolet to Mid-Infrared II; (1998) https://doi.org/10.1117/12.304449
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

We report on the fabrication and characterization of buried heterostructure quantum cascade (BH-QC) lasers. The buried heterostructure is formed by regrowth of InP lateral on the side walls and on top of the InAlAs/InGaAs laser structure by molecular beam epitaxy (MBE) after in situ surface cleaning. Thermal Cl₂ etching is applied to the etched laser structure to remove the native oxides of the ternaries prior to regrowth of InP. Buried heterostructure QC lasers demonstrated excellent performances with lower threshold current densities (as low as 4.5kA/cm² at T equals 300K) and higher slope efficiencies that we attribute to lower waveguide losses and a better heat dissipation.

Citation Download Citation

Mattias Beck, Jerome Faist, Claire F. Gmachl, Federico Capasso, Deborah L. Sivco, James N. Baillargeon, and Alfred Y. Cho "Buried heterostructure quantum cascade lasers", Proc. SPIE 3284, In-Plane Semiconductor Lasers: from Ultraviolet to Mid-Infrared II, (7 April 1998); https://doi.org/10.1117/12.304449

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