Influence of laser deposition conditions on optical properties of silicon composite films

Ivan Z. Indutnyi; E. B. Kaganovich; A. A. Kudryavtsev; E. G. Manoilov; George S. Svechnikov

doi:10.1117/12.280577

18 August 1997 Influence of laser deposition conditions on optical properties of silicon composite films

Ivan Z. Indutnyi, E. B. Kaganovich, A. A. Kudryavtsev, E. G. Manoilov, George S. Svechnikov

Proceedings Volume 3184, Microelectronic Packaging and Laser Processing; (1997) https://doi.org/10.1117/12.280577
Event: ISMA '97 International Symposium on Microelectronics and Assembly, 1997, Singapore, Singapore

Abstract

In this paper the main optical properties of Si nanocrystalline films prepared by pulse laser deposition of Si in N₂ or He atmosphere were reviewed. Both reflectance and transmission spectra were measured in the range of 200-1200nm and were used for calculation of films optical constants. It has been shown that films have composite structure and contain Si nanocrystallites in SiO_xN_y matrix. Obtained visible photoluminescence of these films is related to quantum confinement in Si dots.

Citation Download Citation

Ivan Z. Indutnyi, E. B. Kaganovich, A. A. Kudryavtsev, E. G. Manoilov, and George S. Svechnikov "Influence of laser deposition conditions on optical properties of silicon composite films", Proc. SPIE 3184, Microelectronic Packaging and Laser Processing, (18 August 1997); https://doi.org/10.1117/12.280577

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