Experimental demonstration of using microelectromechanical deformable mirrors to control optical aberrations

Michael C. Roggemann; Victor M. Bright; Byron M. Welsh; Shaun R. Hick; Peter C. Roberts; William D. Cowan; John H. Comtois

doi:10.1117/12.279038

17 October 1997 Experimental demonstration of using microelectromechanical deformable mirrors to control optical aberrations

Michael C. Roggemann, Victor M. Bright, Byron M. Welsh, Shaun R. Hick, Peter C. Roberts, William D. Cowan, John H. Comtois

Author Affiliations +

Proceedings Volume 3126, Adaptive Optics and Applications; (1997) https://doi.org/10.1117/12.279038
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Micro-electro-mechanical deformable mirrors (MEM-DM) are solid state electronic devices with small, movable reflective surface elements which can be used to manipulate the phase of optical wave fronts. MEM-DMs differ from conventional continuous facesheet deformable mirrors in that the movable surface of a MEM-DM consists of a set of segmented moving surfaces. The segmented, reflective surfaces of a MEM-DM give rise to larger diffraction effects than those provided by continous facesheet deformable mirrors. However, MEM-DMs are still attractive due to their low cost and the low drive voltages. In this paper we present laboratory results demonstrating reduction of a fixed aberration using a MEM-DM device.

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Michael C. Roggemann, Victor M. Bright, Byron M. Welsh, Shaun R. Hick, Peter C. Roberts, William D. Cowan, and John H. Comtois "Experimental demonstration of using microelectromechanical deformable mirrors to control optical aberrations", Proc. SPIE 3126, Adaptive Optics and Applications, (17 October 1997); https://doi.org/10.1117/12.279038

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KEYWORDS

Mirrors

Wavefronts

Point spread functions

Micromirrors

Deformable mirrors

Microelectromechanical systems

Electrodes

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