High-speed electron beam data verification system using high-performance neural network accelerator board

Toshiyuki Tamura; Dominique Bouchon; Pierre Fournier; Koichi Moriizumi; Ken-ichi Tanaka; Kazuo Kyuma

doi:10.1117/12.257257

31 October 1996 High-speed electron beam data verification system using high-performance neural network accelerator board

Toshiyuki Tamura, Dominique Bouchon, Pierre Fournier, Koichi Moriizumi, Ken-ichi Tanaka, Kazuo Kyuma

Author Affiliations +

Proceedings Volume 2908, Machine Vision Applications, Architectures, and Systems Integration V; (1996) https://doi.org/10.1117/12.257257
Event: Photonics East '96, 1996, Boston, MA, United States

Abstract

We have developed a high speed automatic inspection system which verifies the validity of electron beam exposure data used for fabrication of VLSI photomasks. By employing neural network accelerator board and adopting a flexible verification scheme based on parallel processing, the system performs 100 times faster than the previous system running on a general purpose workstation. In this paper, the architecture of this system and some salient techniques implemented in the system are presented.

Citation Download Citation

Toshiyuki Tamura, Dominique Bouchon, Pierre Fournier, Koichi Moriizumi, Ken-ichi Tanaka, and Kazuo Kyuma "High-speed electron beam data verification system using high-performance neural network accelerator board", Proc. SPIE 2908, Machine Vision Applications, Architectures, and Systems Integration V, (31 October 1996); https://doi.org/10.1117/12.257257

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