New type of multijunction thermopile IR detector

Tietun Sun; Li Hui Guo

doi:10.1117/12.252105

25 September 1996 New type of multijunction thermopile IR detector

Tietun Sun, Li Hui Guo

Author Affiliations +

Proceedings Volume 2894, Detectors, Focal Plane Arrays, and Applications; (1996) https://doi.org/10.1117/12.252105
Event: Photonics China '96, 1996, Beijing, China

Abstract

A newly designed thin-film thermopile infrared detector, which as an absorption layer and a sensitive area on two sides are fabricated using integrated-circuit technology. The device uses a series-connected thermocouples array whose `hot' junction are supported on a thin Myler film of 1 - 3 micrometers thickness. By a special method of fasting the shadow mask, the thermopile with 48 Bi-Sb couples for 2 X 2 mm² area produces a responsivity of 50 - 70 V/W and relaxation time of about 70 ms.

Citation Download Citation

Tietun Sun and Li Hui Guo "New type of multijunction thermopile IR detector", Proc. SPIE 2894, Detectors, Focal Plane Arrays, and Applications, (25 September 1996); https://doi.org/10.1117/12.252105

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