Application of micromachining technology to optical devices and systems

Hiroyuki Fujita

doi:10.1117/12.251253

23 September 1996 Application of micromachining technology to optical devices and systems (Same as Vols. 2880 and 2882, p. 2)

Hiroyuki Fujita

Author Affiliations +

Proceedings Volume 2881, Microelectronic Structures and MEMS for Optical Processing II; (1996) https://doi.org/10.1117/12.251253
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

Micromachine technologies based on IC-compatible micromachining have advantages denoted by three `M's'. Miniaturization is the most popular but Multiplicity, which means the batch fabrication capability of many complicated elements, and Microelectronics to control motions or to add different functions such as the optical function are equally important. This paper deals with the application of micromachine technologies to micro optical devices. A basic concept making the best use of the advantages is proposed. Recent examples of optical microelectromechanical systems are reviewed.

Citation Download Citation

Hiroyuki Fujita "Application of micromachining technology to optical devices and systems (Same as Vols. 2880 and 2882, p. 2)", Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); https://doi.org/10.1117/12.251253

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