Mode structure laser radiation influence on the periodical surface structures intracavity production

Vasily V. Valyavko; Vladimir P. Osipov

doi:10.1117/12.250930

13 September 1996 Mode structure laser radiation influence on the periodical surface structures intracavity production

Vasily V. Valyavko, Vladimir P. Osipov

Proceedings Volume 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III; (1996) https://doi.org/10.1117/12.250930
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

The aim of this paper is the theoretical and experimental study of the mode structure laser radiation influence on the basic parameters of the sharp periodical submicron structures (grooves) system which is formed on the solid-state surface by means ofthe intracavity method. It is shown that the longitudinal resonator mode influence is one of the important factors determining the groove width. This factor may be the main one for wide-range infrared lasers with short cavities such as high-pressure carbon dioxide lasers. The comparison of the theoretical analysis with the experimental data enables to conclude that the treated surface damage looking like the sharp equidistant grooves system is formed only when the transverse mode TEM is used. The higher order transverse modes lead to the chaotically located microcraters producing. It is achieved that the grooves system contrast depends on the laser radiation spectrum width, the cavity length, the mirrors reflectivities and practically doesn't depend on the laser beam turn angle. Key words: Intracavity laser treatment of the surface, laser radiation mode structure, submicron periodical structures forming.

Citation Download Citation

Vasily V. Valyavko and Vladimir P. Osipov "Mode structure laser radiation influence on the periodical surface structures intracavity production", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); https://doi.org/10.1117/12.250930

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