Structured CVD-silicon carbonitride coatings

Alexey G. Varlamov

doi:10.1117/12.250887

13 September 1996 Structured CVD-silicon carbonitride coatings

Alexey G. Varlamov

Proceedings Volume 2875, Microelectronic Device and Multilevel Interconnection Technology II; (1996) https://doi.org/10.1117/12.250887
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

Using functional structured ceramic multielemental composition coatings as protective ones is going to become a modern tendency. For such coatings CVD-synthesis it is necessary to use precursors gas mixture that are potentially able to educe several condensed compounds. Then, under certain synthesis conditions `hard solution' type complex compounds (oxicarbides, oxinitrides, carbonitrides etc.) are produced as a result of a heterogeneous reaction, proceeding on active centers, macroscopically continuously and evenly distributed all over the surface. Different synthesis conditions result in different composition condensed products deposition (different elements correlation). The synthesis conditions changing during the deposition process lead to layer-by-layer coating composition changing, that is to an in situ structured coating obtaining. In the present work the `hard solution' type variable composition compounds CVD obtaining possibility is considered with the SiNC- coatings synthesis as an example.

Citation Download Citation

Alexey G. Varlamov "Structured CVD-silicon carbonitride coatings", Proc. SPIE 2875, Microelectronic Device and Multilevel Interconnection Technology II, (13 September 1996); https://doi.org/10.1117/12.250887

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