Soft x-ray (2 to 6 keV) spectroscopy using gratings at extreme grazing incidence

Alessio Boscolo; Luca Poletto; Giuseppe Tondello

doi:10.1117/12.245110

19 July 1996 Soft x-ray (2 to 6 keV) spectroscopy using gratings at extreme grazing incidence

Alessio Boscolo, Luca Poletto, Giuseppe Tondello

Author Affiliations +

Proceedings Volume 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III; (1996) https://doi.org/10.1117/12.245110
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

In soft x-ray spectroscopy the region from 2 to 6 keV is the most critical, because crystal properties are not so good as at higher energies and optical gratings become inefficient. We have investigated the performances of ion etched blazes gratings as components for soft x-ray spectroscopy. The gratings were mounted in a Rowland geometry at angels of incidence varying from 89 degrees to 89.45 degrees. As source, we used a microfocus soft x-ray source and as detector an uncoated channel electron multiplier (CEM) sliding along the Rowland circle to scan the spectrum. We recorded several spectra between 50 eV and 6 keV and among them the L lines of Zr, Mo, Pd and the K lines of Ti, Cr, Fe. The spectral resolution obtained shows essentially almost slit limited line widths. The diffraction efficiency ranges from 1 to 3 percent at 89.35 degrees and up to 4.2 percent at 89 degrees. This experiment proves that it is possible to extend the classical spectroscopic techniques to the soft x-ray region.

Citation Download Citation

Alessio Boscolo, Luca Poletto, and Giuseppe Tondello "Soft x-ray (2 to 6 keV) spectroscopy using gratings at extreme grazing incidence", Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); https://doi.org/10.1117/12.245110

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