Differential optical profilometer using a single-probe beam

N. B. E. Sawyer; Chung Wah See; Michael G. Somekh

doi:10.1117/12.250795

18 September 1996 Differential optical profilometer using a single probe beam

N. B. E. Sawyer, Chung Wah See, Michael G. Somekh

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250795
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.

Citation Download Citation

N. B. E. Sawyer, Chung Wah See, and Michael G. Somekh "Differential optical profilometer using a single probe beam", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250795

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