Calibrating vertical magnification of surface roughness tester by using EMT and heterodyne laser interferometer

Chu-Shik Kang

doi:10.1117/12.2299079

1 September 1996 Calibrating vertical magnification of surface roughness tester by using EMT and heterodyne laser interferometer

Chu-Shik Kang

Author Affiliations +

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27785G (1996) https://doi.org/10.1117/12.2299079
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

We developed a system which can calibrate the vertical magnification of surface roughness testers in the range of Itc, 0.1 ti 10 Ã‚Âµm with high accuracy. The system consists of an electromechanical transducer(EMT) and a heterodyne laser interferometer. With voltage applied, EMT simulates a sinusoidal surface and heterodyne laser interferometer is used to measure the amplitude of the simulated surface. By calculating the theoretical roughness value for this surface, and dividing it by the measured roughness value, we can obtain the calibiation constant. With this calibration system, the relative uncertainty of calibration is 2%.

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Chu-Shik Kang "Calibrating vertical magnification of surface roughness tester by using EMT and heterodyne laser interferometer", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27785G (1 September 1996); https://doi.org/10.1117/12.2299079

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