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A fast and accurate method is introduced and analyzed for size determination of metallic particles on flat substrates. It is based on the measurement of the minima angular positions of the S-polarized far field scattering patterns at normal incidence. The method has been theoretically and experimentally checked for both cylindrical and spherical protuberance geometry on conducting flat substrates.
F. González
"Determination of the metallic particle size on flat substrates by means of light scattering experiments", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27783A (1 September 1996); https://doi.org/10.1117/12.2299000
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F. González, "Determination of the metallic particle size on flat substrates by means of light scattering experiments," Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27783A (1 September 1996); https://doi.org/10.1117/12.2299000