Ellipsometric analysis of quasirugate films: regularization technique revisited

Jiri Hrdina; Jaroslav Sobota; Vratislav Perina

doi:10.1117/12.246828

19 August 1996 Ellipsometric analysis of quasirugate films: regularization technique revisited

Jiri Hrdina, Jaroslav Sobota, Vratislav Perina

Proceedings Volume 2776, Developments in Optical Component Coatings; (1996) https://doi.org/10.1117/12.246828
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

Analysis of refractive index profiles of rugate and quasi- rugate films from measurements requires special techniques to avoid destabilization of solution due to a large number of fitted parameters. Regularization technique suggested recently takes into account a priori information about the index profile by adding the so called stabilizing operator to the merit function. We propose a more general form of this operator and different model of the system thus allowing for better correspondence between the stabilizer and a priori information. The new technique is demonstrated on the analysis of rf magnetron sputtered quasi-rugate films of SiO₂/TiO₂ with nominally linear material composition profiles and the results are compared to profiles established from Rutherford backscattering spectroscopy measurements.

Citation Download Citation

Jiri Hrdina, Jaroslav Sobota, and Vratislav Perina "Ellipsometric analysis of quasirugate films: regularization technique revisited", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246828

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available