Performance comparison of piezoelectric accelerometer and laser interferometer in vibration monitoring and measurements

Hong Wei; Kenneth J. Stout

doi:10.1117/12.228856

22 December 1995 Performance comparison of piezoelectric accelerometer and laser interferometer in vibration monitoring and measurements

Hong Wei, Kenneth J. Stout

Author Affiliations +

Proceedings Volume 2595, Machine Tool, In-Line, and Robot Sensors and Controls; (1995) https://doi.org/10.1117/12.228856
Event: Photonics East '95, 1995, Philadelphia, PA, United States

Abstract

In this paper, vibration monitoring and measurement carried out in the newly developed nanometer metrology laboratory in Birmingham University, is described with respect to measurement methods and instrument performance. Two types of instrument -- piezoelectric accelerometer (B&K type 8318 with a type 2140 bus-controlled frequency analyzer) and laser interferometer (Renishaw ML10 laser interferometer with the Keithley multi-channel FFT analyzer) were used in vibration measurement on capability verification of a vibration isolation system. Vibration results from a concrete block are presented. From the point of view of the measured vibration results, it is demonstrated that the performance of the above two instruments is not completely the same in the different frequency ranges. The related comparison and discussions are presented in this paper.

Citation Download Citation

Hong Wei and Kenneth J. Stout "Performance comparison of piezoelectric accelerometer and laser interferometer in vibration monitoring and measurements", Proc. SPIE 2595, Machine Tool, In-Line, and Robot Sensors and Controls, (22 December 1995); https://doi.org/10.1117/12.228856

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available