Fizeau interferometry for large convex surfaces

James H. Burge

doi:10.1117/12.218415

8 September 1995 Fizeau interferometry for large convex surfaces

James H. Burge

Proceedings Volume 2536, Optical Manufacturing and Testing; (1995) https://doi.org/10.1117/12.218415
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Measurements of large convex surfaces are notoriously difficult because they require auxiliary optics that are larger than the surface being tested. Fizeau interferometry is well suited for these surfaces because the only surface required to be made to high accuracy is the concave reference surface, which is only slightly larger than the surface being measured. Convex surfaces which are spherical or aspheric can be measured using spherical, aspherical, or holographic test plates. The reference surfaces for these tests must be of good quality and measured to high accuracy. The optical systems that provide illumination and create an image of the interference pattern do not have to be made to high quality. The illumination systems can typically have errors several orders of magnitude larger than the allowable surface measurement errors, so these systems can be made at low cost. Several such systems using low cost aspheric mirrors and lenses for measuring convex spherical and aspherical surfaces are presented.

Citation Download Citation

James H. Burge "Fizeau interferometry for large convex surfaces", Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); https://doi.org/10.1117/12.218415

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available