Ellipsometric measurements for thin film based sensor systems

Ratchapak Chitaree; V. Murphy; K. Weir; Andrew W. Palmer; Kenneth T. V. Grattan; Brian D. MacCraith

doi:10.1117/12.221105

21 September 1995 Ellipsometric measurements for thin-film-based sensor systems

Ratchapak Chitaree, V. Murphy, K. Weir, Andrew W. Palmer, Kenneth T. V. Grattan, Brian D. MacCraith

Proceedings Volume 2509, Smart Structures: Optical Instrumentation and Sensing Systems; (1995) https://doi.org/10.1117/12.221105
Event: European Symposium on Optics for Environmental and Public Safety, 1995, Munich, Germany

Abstract

The application of a highly birefringent fiber polarization modulation technique for ellipsometric measurements on sol-gel thin films is described. The ability of the system to determine the ellipsometric parameters of thin films is demonstrated. The system is then used to monitor the ellipsometric parameters of thin films on exposure to a perturbing environment of humidity and pressure. The potential of the system for application in chemical sensor systems is indicated and discussed.

Citation Download Citation

Ratchapak Chitaree, V. Murphy, K. Weir, Andrew W. Palmer, Kenneth T. V. Grattan, and Brian D. MacCraith "Ellipsometric measurements for thin-film-based sensor systems", Proc. SPIE 2509, Smart Structures: Optical Instrumentation and Sensing Systems, (21 September 1995); https://doi.org/10.1117/12.221105

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