High-resolution surface imaging process using difunctional silylating reagent B(DMA)MS for ArF excimer laser lithography

Katsumi Maeda; Takeshi Ohfuji; Naoaki Aizaki; Etsuo Hasegawa

doi:10.1117/12.210357

9 June 1995 High-resolution surface imaging process using difunctional silylating reagent B(DMA)MS for ArF excimer laser lithography

Katsumi Maeda, Takeshi Ohfuji, Naoaki Aizaki, Etsuo Hasegawa

Author Affiliations +

Proceedings Volume 2438, Advances in Resist Technology and Processing XII; (1995) https://doi.org/10.1117/12.210357
Event: SPIE's 1995 Symposium on Microlithography, 1995, Santa Clara, CA, United States

Abstract

This paper describes the silylation properties and the lithographic performance of ArF (193 nm) surface imaging process with bis(dimethylamino)methylsilane [B(DMA)MS]. The silicon concentration of silylated region with B(DMA)MS in liquid phase is much higher (2 times) than that for the conventional silylation with dimethylsilyldimethylamine (DMSDMA) in vapor phase. The excellent resolution of 0.12 micrometers L/S and practical DOF (1.0 micrometers in a range for 0.18 micrometers L/S) have been achieved using ArF exposure system with a conventional binary mask under a normal illumination. Further, the resolution of 0.088 micrometers has been obtained with a Levenson-type phase shifting mask.

Citation Download Citation

Katsumi Maeda, Takeshi Ohfuji, Naoaki Aizaki, and Etsuo Hasegawa "High-resolution surface imaging process using difunctional silylating reagent B(DMA)MS for ArF excimer laser lithography", Proc. SPIE 2438, Advances in Resist Technology and Processing XII, (9 June 1995); https://doi.org/10.1117/12.210357

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available