480 x 2 hybrid HgCdTe infrared focal plane arrays

Yoshihiro Miyamoto; Kousaku Yamamoto; Masahiro Tanaka; Akira Sawada; Kazuya Kubo

doi:10.1117/12.188656

17 October 1994 480 x 2 hybrid HgCdTe infrared focal plane arrays

Yoshihiro Miyamoto, Kousaku Yamamoto, Masahiro Tanaka, Akira Sawada, Kazuya Kubo

Proceedings Volume 2269, Infrared Technology XX; (1994) https://doi.org/10.1117/12.188656
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

To meet the sensitivity and resolution requirements of high-performance long-wavelength infrared (LWIR) imaging systems, we developed hybrid HgCdTe 480 X 2 infrared focal plane arrays (IRFPAs) for the 8 - 10 micrometers band. We connected the hybrids using indium bumps and a sapphire wiring substrate to reduce the thermal expansion mismatch between the silicon readout circuits and the photodiode arrays. Using the mature liquid phase epitaxy (LPE) technology and a CdZnTe substrate, we fabricated LWIR photodiode arrays. Each photodiode array consists of 240 X 2-element n+/n/p diodes formed by boron implantation. The arrays have an average zero-bias resistance of 3.8 M(Omega) and a shunt resistance of more than 100 M(Omega) for a 10.5 micrometers cutoff wavelength. For the readout devices, we used n-channel charge coupled devices (CCDs) with charge capacities greater than 4 X 10⁷ electrons, and 4 signal outputs capable of 6 MHz data rates. The input stages of the CCD include skimming and partitioning functions. Operating at 80 K, the arrays had a mean laboratory D*_(lambda p) of 6.4 X 10¹⁰ cmHz^0.5/W with f/1.2 optics. The detectivity variation ((sigma) /m) was 14%, and the operable pixel yield exceeded 99%.

Citation Download Citation

Yoshihiro Miyamoto, Kousaku Yamamoto, Masahiro Tanaka, Akira Sawada, and Kazuya Kubo "480 x 2 hybrid HgCdTe infrared focal plane arrays", Proc. SPIE 2269, Infrared Technology XX, (17 October 1994); https://doi.org/10.1117/12.188656

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available