PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Conventional vacuum deposition had gradually been improved by a lot of special processes. We summarize the most important ones and give an evaluation of a few process parameters. The discussion is limited to optical coating on glass.
Hermann R. Dobler
"Energetic particles for vacuum deposition", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192108
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Hermann R. Dobler, "Energetic particles for vacuum deposition," Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192108