Design of an integrated scatter instrument for measuring scatter losses of superpolished optical surfaces, application to surface characterization of transparent fused quartz substrates

Oliver Kienzle; Volker Scheuer; Josef Staub; Theo T. Tschudi

doi:10.1117/12.192058

4 November 1994 Design of an integrated scatter instrument for measuring scatter losses of superpolished optical surfaces: application to surface characterization of transparent fused quartz substrates

Oliver Kienzle, Volker Scheuer, Josef Staub, Theo T. Tschudi

Author Affiliations +

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192058
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

In this presentation the design concept of an instrument for measuring total integrated scattering with a resolution limit of 0.1 ppm will be described. Furthermore the result of a theoretical model will be given which includes the scattering contributions from the front and the back surface of a transparent substrate. With the result obtained, surface roughness and power spectral density functions of the individual substrate surfaces can be calculated from scatter measurements. The improved measurement facility of the instrument in conjunction with the developed theoretical model allows surface characterization of transparent substrates in case of negligible volume scattering of the bulk material. Measurement results will be presented verifying the results of the model and showing the instrument's ability to characterize polishing quality of transparent substrates. Scatter losses as low as 0.6 ppm corresponding to 1 angstrom rms surface roughness have been determined measuring a `superpolished' transparent fused quartz substrate.

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Oliver Kienzle, Volker Scheuer, Josef Staub, and Theo T. Tschudi "Design of an integrated scatter instrument for measuring scatter losses of superpolished optical surfaces: application to surface characterization of transparent fused quartz substrates", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192058

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