Microwave properties of monolithic Y-Ba-Cu-O transmission line devices fabricated by the laser-writing patterning technique

W. N. Maung; Donald P. Butler; W. Xiong; Witold Kula; Roman Sobolewski

doi:10.1117/12.166154

4 January 1994 Microwave properties of monolithic Y-Ba-Cu-O transmission line devices fabricated by the laser-writing patterning technique

W. N. Maung, Donald P. Butler, W. Xiong, Witold Kula, Roman Sobolewski

Author Affiliations +

Proceedings Volume 2156, High Tc Microwave Superconductors and Applications; (1994) https://doi.org/10.1117/12.166154
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

We report on the microwave characteristics of coplanar strip transmission line devices fabricated in epitaxial YBaCuO thin films deposited on LaAlO₃ substrates using the novel laser-writing patterning technique. This technique uses laser heating to selectively anneal regions of an oxygen depleted YBaCuO thin film to form local superconducting phases. In this manner, superconductive coplanar strip transmission line structures surrounded by the semiconducting YBaCuO phase were patterned with no photomasks, surface contamination or edge degradation.

Citation Download Citation

W. N. Maung, Donald P. Butler, W. Xiong, Witold Kula, and Roman Sobolewski "Microwave properties of monolithic Y-Ba-Cu-O transmission line devices fabricated by the laser-writing patterning technique", Proc. SPIE 2156, High Tc Microwave Superconductors and Applications, (4 January 1994); https://doi.org/10.1117/12.166154

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