Research on noncontact flatness measurement of magnetic disk with optical heterodyne interferometer

Yang Zhao; Jia Wang; Dacheng Li; Mang Cao; Xiang Li

doi:10.1117/12.156376

22 September 1993 Research on non-contact flatness measurement of magnetic disk with optical heterodyne interferometer

Yang Zhao, Jia Wang, Dacheng Li, Mang Cao, Xiang Li

Author Affiliations +

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156376
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

The paper introduces a new method to measure the flatness of the disk with the laser heterodyne interferometer. Its most important advantage is that it can measure the large and intermediate scale disk profile at the same time, without sacrificing the measurement accuracy. The resolution of the interferometer is 0.3 nm, the accuracy better than 0.04 jim, the dynamic range larger than 5 mm. Otherwise the interferometer can nieasure the disk global and local profile in tangential and radial direction.

Citation Download Citation

Yang Zhao, Jia Wang, Dacheng Li, Mang Cao, and Xiang Li "Research on non-contact flatness measurement of magnetic disk with optical heterodyne interferometer", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156376

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