Design of a surface-roughness measuring sensor with high accuracy and wide dynamic range

Xiao Dong Lu; Xiangqian Jiang; Tie-Bang Xie; Zhu Li

doi:10.1117/12.156461

22 September 1993 Design of a surface-roughness measuring sensor with high accuracy and wide dynamic range

Xiao Dong Lu, Xiangqian Jiang, Tie-Bang Xie, Zhu Li

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156461
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

In this paper a new stylus sensor is introduced which has high accuracy microdisplacement and wide dynamic range. Its resolution is O. OO5m its range of vertical measurement is mm. The sensor''s mechanical characteristics including statical and dynamic mechanical characteristics are discussed. Key words: surface roughness roughness measurement sensor design

Citation Download Citation

Xiao Dong Lu, Xiangqian Jiang, Tie-Bang Xie, and Zhu Li "Design of a surface-roughness measuring sensor with high accuracy and wide dynamic range", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156461

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