Paper
31 January 1994 Characterization of porous silicon by microscopic Fourier transform infrared spectroscopy
Adele Sassella, Alessandro Borghesi, B. Pivac, Lorenzo Pavesi
Author Affiliations +
Proceedings Volume 2089, 9th International Conference on Fourier Transform Spectroscopy; (1994) https://doi.org/10.1117/12.166806
Event: Fourier Transform Spectroscopy: Ninth International Conference, 1993, Calgary, Canada
Abstract
Infrared absorption of luminescent porous silicon has been measured with high spatial resolution to study the local chemical composition. A few typical spectra, which evidence the presence of impurities such as H, O, and C in different bonding configurations, have been selected as the most significant and analyzed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Adele Sassella, Alessandro Borghesi, B. Pivac, and Lorenzo Pavesi "Characterization of porous silicon by microscopic Fourier transform infrared spectroscopy", Proc. SPIE 2089, 9th International Conference on Fourier Transform Spectroscopy, (31 January 1994); https://doi.org/10.1117/12.166806
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KEYWORDS
Picosecond phenomena

Silicon

Absorption

Absorbance

Infrared spectroscopy

FT-IR spectroscopy

Etching

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