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To control processes capable of accuracy and surface finish requires surface measuring equipment of a very high order of capability and versatility. Metrology has also required a similar change in discipline to include more physical considerations than was considered necessary only a few years ago. In what follows some of the existing trends are reviewed.
David J. Whitehouse
"Trends in instrumentation for roughness and form measurement", Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); https://doi.org/10.1117/12.168063
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David J. Whitehouse, "Trends in instrumentation for roughness and form measurement," Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); https://doi.org/10.1117/12.168063