Die-to-database inspection using high accuracy database representation

Nissim Elmaliach; Yair Eran; Shiree Shafrir; Carla Thoe; Patricia D. Beard

doi:10.1117/12.167263

15 February 1994 Die-to-database inspection using high accuracy database representation

Nissim Elmaliach, Yair Eran, Shiree Shafrir, Carla Thoe, Patricia D. Beard

Author Affiliations +

Proceedings Volume 2087, 13th Annual BACUS Symposium on Photomask Technology and Management; (1994) https://doi.org/10.1117/12.167263
Event: 13th Annual BACUS Symposium on Photomask Technology and Management, 1993, Santa Clara, CA, United States

Abstract

The relation between the accuracy of the database representation and the inspection quality is discussed. In order to visualize the problems, a simplified model of an inspection machine is described. Using this model various aspects of database accuracy are presented. It is shown that some of the conventional methods for digitization of trapezoids, e.g. Brezenham method, may cause pixel-positioning errors and dropouts between figures. A better approach that is based on high precision subpixel addressing is proposed and its implication on reducing the database inaccuracy is proved.

Citation Download Citation

Nissim Elmaliach, Yair Eran, Shiree Shafrir, Carla Thoe, and Patricia D. Beard "Die-to-database inspection using high accuracy database representation", Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); https://doi.org/10.1117/12.167263

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE