Acousto-optic scanning system for a large-size mask plotter

Eiichi Tamaki

doi:10.1117/12.165203

29 December 1993 Acousto-optic scanning system for a large-size mask plotter

Eiichi Tamaki

Proceedings Volume 1987, Recording Systems: High-Resolution Cameras and Recording Devices and Laser Scanning and Recording Systems; (1993) https://doi.org/10.1117/12.165203
Event: Electronic Imaging Device Engineering, 1993, Munich, Germany

Abstract

A two-beam laser scanning system using an acousto-optic deflector (AOD) has been developed. The lensing effect and the AOD nonlinearity were investigated, and were completely compensated for. In order to write a variety of masks, a servomotor-based auto- focus and an auto-revolver with up to three objective lenses were adopted.

Citation Download Citation

Eiichi Tamaki "Acousto-optic scanning system for a large-size mask plotter", Proc. SPIE 1987, Recording Systems: High-Resolution Cameras and Recording Devices and Laser Scanning and Recording Systems, (29 December 1993); https://doi.org/10.1117/12.165203

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available