IV-VI on fluoride/Si structures for IR-sensor-array applications

Alexander Fach; Clau Maissen; Jiri Masek; Stefan I. Teodoropol; Hans Zogg; Harald Boettner

doi:10.1117/12.162784

19 November 1993 IV-VI on fluoride/Si structures for IR-sensor-array applications

Alexander Fach, Clau Maissen, Jiri Masek, Stefan I. Teodoropol, Hans Zogg, Harald Boettner

Proceedings Volume 1985, Physical Concepts and Materials for Novel Optoelectronic Device Applications II; (1993) https://doi.org/10.1117/12.162784
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications II, 1993, Trieste, Italy

Abstract

Epitaxial narrow gap IV-VI layers on Si-substrates offer an alternate to Hg_1-xCd_xTe for infrared-focal plane arrays (IRFPA) with similar ultimate sensitivities. We report on the following improvements in reaching the goal of an easily producible fully monolithic IV- VI-on-active-Si IR-FPA: (1) Up to now, compatibility with the Si-substrate was reached through use of a stacked CaF₂/BaF₂ buffer layer, this layer is replaced by a very thin CaF₂ buffer only, which is more suitable for photolithographic processing; (2) fine resolution wet etching of the IV-VI layers is much easier and reproducible with this new type of buffer; and (3) etching of the surface was found to improve the behavior of the blocking Pb-contact towards better I-V characteristics.

Citation Download Citation

Alexander Fach, Clau Maissen, Jiri Masek, Stefan I. Teodoropol, Hans Zogg, and Harald Boettner "IV-VI on fluoride/Si structures for IR-sensor-array applications", Proc. SPIE 1985, Physical Concepts and Materials for Novel Optoelectronic Device Applications II, (19 November 1993); https://doi.org/10.1117/12.162784

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available