Surface modifications of ceramic materials using excimer lasers: influence of plasma formation and materials properties on possible industrial applications

K. Schutte; Hans Wilhelm Bergmann; Emil Schubert; Robert Queitsch

doi:10.1117/12.144548

4 May 1993 Surface modifications of ceramic materials using excimer lasers: influence of plasma formation and materials properties on possible industrial applications

K. Schutte, Hans Wilhelm Bergmann, Emil Schubert, Robert Queitsch

Author Affiliations +

Proceedings Volume 1810, 9th International Symposium on Gas Flow and Chemical Lasers; (1993) https://doi.org/10.1117/12.144548
Event: Ninth International Symposium on Gas Flow and Chemical Lasers, 1992, Heraklion, Greece

Abstract

The authors examine a contact free, optical machining process by illuminating ceramic substrates like alumina, silicon nitride, and silicon carbide with an excimer laser. Using the effect of sealing the surface by simultaneously smoothing and reducing of surface defects it is possible to generate a homogeneous, remelted surface layer. The influence of purity and pre- treatment on the wear-resistance against mechanical and dynamical stresses is reported. It can be shown that the applied laser parameters are strongly correlated to the results of the mechanical tests and the studies of the laser produced plasma concerning plasma formation, plasma propagation, and the local resolved spectroscopic measurements.

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K. Schutte, Hans Wilhelm Bergmann, Emil Schubert, and Robert Queitsch "Surface modifications of ceramic materials using excimer lasers: influence of plasma formation and materials properties on possible industrial applications", Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); https://doi.org/10.1117/12.144548

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