Adjustment and design criteria of lenses in the case of partially coherent imaging

Jens-Ullrich Müller; Gerd Rieche; Dietrich Schmidt

doi:10.1117/12.142809

15 April 1993 Adjustment and design criteria of lenses in the case of partially coherent imaging

Jens-Ullrich Müller, Gerd Rieche, Dietrich Schmidt

Proceedings Volume 1780, Lens and Optical Systems Design; 17800G (1993) https://doi.org/10.1117/12.142809
Event: Optical Systems Design '92, 1992, Berlin, Germany

Abstract

The options of the PRKH software are presented. The PRKH software is designed for the calculations of intensity distributions in partially coherent imaging of two-dimensional structures. The consistency check of the PRKH software was performed by comparison between PRKH-computed intensities and measurements in the image field of a projection lens. The achieved results were generalized, and adjustment rules were derived from them.

Citation Download Citation

Jens-Ullrich Müller, Gerd Rieche, and Dietrich Schmidt "Adjustment and design criteria of lenses in the case of partially coherent imaging", Proc. SPIE 1780, Lens and Optical Systems Design, 17800G (15 April 1993); https://doi.org/10.1117/12.142809

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