Holographic recording of large-aperture, high-efficiency, high-damage-threshold, transmission diffraction gratings

J. Joseph Armstrong; Terrance J. Kessler

doi:10.1117/12.140754

5 February 1993 Holographic recording of large-aperture, high-efficiency, high-damage-threshold, transmission diffraction gratings

J. Joseph Armstrong, Terrance J. Kessler

Author Affiliations +

Proceedings Volume 1755, Interferometry: Techniques and Analysis; (1993) https://doi.org/10.1117/12.140754
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Surface-relief, holographic transmission gratings are generated in positive photoresist with excellent performance characteristics. High intrinsic grating efficiencies of 99% are obtained using an inherently fringe-stable holographic interferometer, which is maximally insensitive to incident pointing errors, to create high aspect ratio nonsinusoidal grooves. Uniform exposures are achieved over apertures of 100 mm in diameter using scanning techniques. Repeatable results are achieved by maintaining pre-exposure and post-exposure processing along with the various exposure parameters.

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J. Joseph Armstrong and Terrance J. Kessler "Holographic recording of large-aperture, high-efficiency, high-damage-threshold, transmission diffraction gratings", Proc. SPIE 1755, Interferometry: Techniques and Analysis, (5 February 1993); https://doi.org/10.1117/12.140754

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