Hybrid integration of surface-emitting microlaser chip and planar optics substrate

Juergen Jahns; Robert A. Morgan; Hung N. Nguyen; James A. Walker; Susan J. Walker; Yiu-May Wong

doi:10.1117/12.138903

13 January 1993 Hybrid integration of surface-emitting microlaser chip and planar optics substrate

Juergen Jahns, Robert A. Morgan, Hung N. Nguyen, James A. Walker, Susan J. Walker, Yiu-May Wong

Author Affiliations +

Proceedings Volume 1751, Miniature and Micro-Optics: Fabrication and System Applications II; (1993) https://doi.org/10.1117/12.138903
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

A one-dimensional array of surface-emitting microlasers was bonded onto a glass substrate that contains a matching array of microlenses and mirrors. The bonding was achieved by solder bump bonding with indium being used as the solder material. The alignment precision is within +/- 2 micrometers. The optical substrate provides a simple interconnection scheme that routes the light from each laser to a well defined output position. The lenses are implemented as diffractive elements and are fabricated by lithography and dry etching.

Citation Download Citation

Juergen Jahns, Robert A. Morgan, Hung N. Nguyen, James A. Walker, Susan J. Walker, and Yiu-May Wong "Hybrid integration of surface-emitting microlaser chip and planar optics substrate", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); https://doi.org/10.1117/12.138903

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE