Fabrication of 2D continuous-relief diffractive optical elements

Michael T. Gale; Markus Rossi; Helmut Schuetz; Peter Ehbets; Hans Peter Herzig; Juan Manuel Teijido

doi:10.1117/12.140448

2 March 1993 Fabrication of 2D continuous-relief diffractive optical elements

Michael T. Gale, Markus Rossi, Helmut Schuetz, Peter Ehbets, Hans Peter Herzig, Juan Manuel Teijido

Proceedings Volume 1732, Holographics International '92; (1993) https://doi.org/10.1117/12.140448
Event: Holographics International '92, 1992, London, United Kingdom

Abstract

Progress in the fabrication of diffractive optical elements (DOEs) as 2-dimensional continuous-relief microstructures is described. The elements are fabricated by laser-beam writing in photoresist and have typical microreliefs up to 5 micrometers and periods down to 10 micrometers . Examples include fan-out elements and Fresnel microlens arrays. The design and fabrication of a 9 X 9 fan-out DOE with a diffraction efficiency of 94% and an overall uniformity of +/- 8% is described. High quality replicas are produced by low-cost embossing and casting techniques.

Citation Download Citation

Michael T. Gale, Markus Rossi, Helmut Schuetz, Peter Ehbets, Hans Peter Herzig, and Juan Manuel Teijido "Fabrication of 2D continuous-relief diffractive optical elements", Proc. SPIE 1732, Holographics International '92, (2 March 1993); https://doi.org/10.1117/12.140448

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