Microinterferometry to 1 pm (Invited Paper)

Winfried Denk

doi:10.1117/12.134893

1 February 1992 Microinterferometry to 1 pm (Invited Paper)

Winfried Denk

Proceedings Volume 1556, Scanning Microscopy Instrumentation; (1992) https://doi.org/10.1117/12.134893
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Measurement of small displacements using interferometry and optical microscopy of transparent phase objects are both well established techniques. Somehow missing, however, is the combination of the interferometry's temporal resolution and displacement sensitivity with the resolving power (and hence ability to spatially discriminate) of high numerical aperture optical microscopy. This paper outlines the design of such an instrument as well as the theory of its operation. The details of both are described in Applied Optics, 29, 2383-91 where relevant references can be found.

Citation Download Citation

Winfried Denk "Microinterferometry to 1 pm (Invited Paper)", Proc. SPIE 1556, Scanning Microscopy Instrumentation, (1 February 1992); https://doi.org/10.1117/12.134893

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